Carrier substrate and element transfer method using the same

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United States of America

PATENT NO 12255098
APP PUB NO 20220270927A1
SERIAL NO

17741530

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Abstract

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A carrier substrate includes a base layer, an antireflection layer, and an energy absorption layer, wherein the antireflection layer is formed on one surface of the base layer and allows an elastic wave generated by a first laser beam transmitted through an element adhesively bonded to the antireflection layer to be transmitted through the base layer without being reflected towards the element, the first laser beam being applied to the element through a source substrate of the element, and the energy absorption layer is formed between the base layer and the antireflection layer to be aligned with the element, and evaporates upon energy absorption.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hwangbo, Yun Daejeon, KR 7 3
Kim, Jae Gu Daejeon, KR 5 8
Kim, Jae Hyun Daejeon, KR 259 2059
Kim, Kwang Seop Daejeon, KR 18 93
Kim, Sang Min Daejeon, KR 135 582
Lee, Hak Joo Daejeon, KR 57 1121
Won, Se Jeong Daejeon, KR 10 70

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