Process control for ion energy delivery using multiple generators and phase control

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12255052
APP PUB NO 20230230804A1
SERIAL NO

18010204

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Abstract

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A method for applying RF power in a plasma process chamber is provided, including: generating a first RF signal; generating a second RF signal; generating a third RF signal; wherein the first, second, and third RF signals are generated at different frequencies; combining the first, second and third RF signals to generate a combined RF signal, wherein a wave shape of the combined RF signal is configured to approximate a sloped square wave shape; applying the combined RF signal to a chuck in the plasma process chamber.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhowmick, Ranadeep San Jose, US 22 45
Holland, John Fremont, US 116 3929
Hudson, Eric Fremont, US 85 1450
Kozakevich, Felix Sunnyvale, US 46 1193
Marakhtanov, Alexei Albany, US 125 2117

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