Multi-beam particle beam system and method for operating same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12255040
APP PUB NO 20210217577A1
SERIAL NO

17215995

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Abstract

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A method of operating a multi-beam particle beam system includes: generating a multiplicity of particle beams such that they each pass through multipole elements that are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multipole elements; exciting the deflection elements of the multipole elements that are intact with the determined excitations; modifying the determined excitations for the deflection elements of the multipole elements that are defective; and exciting the deflection elements of the defective multipole elements with the modified excitations. Modifying the determined excitations includes adding corrective excitations to the determined excitations. The corrective excitations are the same for all deflection elements of the defective multipole element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MULTISEM GMBHCARL-ZEISS-STRASSE 22 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bihr, Ulrich Kirchheim/Dirgenheim, DE 13 24
Jacobi, Joerg Herbrechtingen, DE 12 106
Kurij, Georg Aalen, DE 4 3
Lenke, Ralf Lauchheim, DE 10 74
Metalidis, Georgo Koenigsbronn-Zang, DE 5 5
Riedesel, Christof Aalen, DE 24 264
Sarov, Yanko Aalen, DE 11 26
Schubert, Stefan Oberkochen, DE 44 461
Thoma, Arne Aalen, DE 8 42
Zeidler, Dirk Oberkochen, DE 57 568

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