Method, electronic device and operating method of electronic device and manufacture of semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12254621
APP PUB NO 20230069493A1
SERIAL NO

17856130

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Abstract

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Disclosed is an operating method of an electronic device for manufacture of a semiconductor device. The method includes receiving, at the electronic device, a computer-aided design (CAD) image for a lithography process of the semiconductor device, and generating, at the electronic device, a first scanning electron microscope (SEM) image and a first segment (SEG) image from the CAD image by using a machine learning-based module, and the first SEG image includes information about a location of a defect.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.; SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kang, Min-Cheol Hwaseong-si, KR 15 93
Kim, Do-Nyun Seoul, KR 15 41
Kim, Jaehoon Seoul, KR 90 386
Kim, Kihyun Seongnam-si, KR 229 2074
Lim, Jaekyung Seoul, KR 1 0

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