Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device

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United States of America

PATENT NO 12253801
APP PUB NO 20190171102A1
SERIAL NO

16273323

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Abstract

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An object of the present invention is to provide a solution which is excellent in both the temporal stability of an organic solvent and the defect inhibition properties. Another object of the present invention is to provide a solution storage body storing the solution, an actinic ray-sensitive or radiation-sensitive resin composition containing the solution, and a pattern forming method and a manufacturing method of a semiconductor device using the solution.

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Patent Owner(s)

  • FUJIFILM CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamimura, Tetsuya Haibara-gun, JP 159 522
Kawada, Yukihisa Haibara-gun, JP 14 12
Takahashi, Satomi Haibara-gun, JP 85 488

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