Two-axis scanning mirror using piezoelectric drivers and looped torsion springs

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12253668
APP PUB NO 20230204944A1
SERIAL NO

17566011

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Abstract

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Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis. The second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis.

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Patent Owner(s)

  • BEIJING VOYAGER TECHNOLOGY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Kong Yin Mountain View, US 3 0
Li, Gary Mountain View, US 46 595
Wang, Youmin Berkeley, US 181 189
Wang, Yufeng Mountain View, US 110 408

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