Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12252396
APP PUB NO 20230127477A1
SERIAL NO

17728844

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Abstract

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In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.

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Patent Owner(s)

  • AGILENT TECHNOLOGIES TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beard, Christopher Murray Allen, US 2 0
Hamlin,, III John Wesley Dallas, US 2 0
Martinez, Soto Jose Antonio Murphy, US 1 0
Taylor, Kelly Jay Allen, US 7 4
Yuan, Win-Jae Jessie Dallas, US 1 0
Zheng, Song Fairview, US 18 67

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