Resonance device and resonance device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12252393
APP PUB NO 20210403316A1
SERIAL NO

17469561

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Abstract

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A resonance device that includes a MEMS substrate including a resonator, an upper lid that seals a vibration space of the resonator, and a ground portion positioned between the MEMS substrate and the upper lid, the ground portion being extended to an inside of the upper lid and electrically connected to the upper lid.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukumitsu, Masakazu Nagaokakyo, JP 36 26
Higuchi, Yoshiyuki Nagaokakyo, JP 16 8

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