MEMS device, liquid ejecting head, and liquid ejecting apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12251936
APP PUB NO 20230226818A1
SERIAL NO

18098157

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Importance

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Abstract

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A MEMS device includes a first substrate 22 including a single-crystal silicon substrate and a second substrate 23 including a single-crystal silicon substrate, in which the first substrate 22 and the second substrate 23 are laminated together, and the first substrate 22 and the second substrate 23 are joined to each other such that the cleavage directions of both substrates intersect each other.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shiozawa, Yu Shiojiri, JP 23 2
Takabe, Motoki Shiojiri, JP 163 350

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