Joined body, holding device, and electrostatic chuck
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Mar 18, 2025
Grant Date -
Oct 5, 2023
app pub date -
Jun 25, 2021
filing date -
Jun 25, 2021
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
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International Classification(s)
- 2021 Application Filing Year
- H01L Class
- 28775 Applications Filed
- 15216 Patents Issued To-Date
- 52.88 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- < 1 Age
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