Substrate transfer devices, systems and methods of use thereof
Number of patents in Portfolio can not be more than 2000
United States of America
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Mar 18, 2025
Grant Date -
Jun 8, 2023
app pub date -
Jan 23, 2023
filing date -
Jan 23, 2023
priority date (Note) -
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Abstract
The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a method includes causing a robot arm to pick up a substrate. The robot arm is caused to pick up the substrate by causing a first mover to rotate or to change a first distance to a second mover. Rotation of the first mover or the change in the first distance causes the first robot arm to rotate about a shoulder axis. The robot arm is further caused to pick up the substrate by causing one of a) a second mover to rotate or b) a third mover to change a second distance to the second mover. Rotation of the second mover or the change in the second distance causes the robot arm to raise or lower.
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