Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane element and methods of manufacturing thereof
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United States of America
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Mar 18, 2025
Grant Date -
Apr 21, 2022
app pub date -
Oct 8, 2021
filing date -
Oct 8, 2021
priority date (Note) -
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Abstract
A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.
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