Optical device improvement

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12249489
APP PUB NO 20230360890A1
SERIAL NO

18131997

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of processing an optical device is provided, including: positioning an optical device on a substrate support in an interior volume of a process chamber, the optical device including an optical device substrate and a plurality of optical device structures formed over the optical device substrate, each optical device structure including a bulk region formed of silicon carbide and one or more surface regions formed of silicon oxycarbide. The method further includes providing one or more process gases to the interior volume of the process chamber, and generating a plasma of the one or more process gases in the interior volume for a first time period when the optical device is on the substrate support, and stopping the plasma after the first time period. A carbon content of the one or more surface regions of each optical device structure is reduced by at least 50% by the plasma.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yongmei San Jose, US 39 428
Chen, Yue Sunnyvale, US 222 2240
Fu, Jinxin Fremont, US 63 45
Godet, Ludovic Sunnyvale, US 327 3246
Hourani, Rami Santa Clara, US 73 286
Ishikawa, David Masayuki Mountain View, US 46 136
Jing, Qun Santa Clara, US 1 0
Kuratomi, Takashi San Jose, US 31 41
Lu, Jinyu Santa Clara, US 3 0
Yang, Jingyi Santa Clara, US 15 7
Yang, Zihao Santa Clara, US 33 62
Zhu, Mingwei San Jose, US 87 334

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