Method for manufacturing variable radio frequency micro-electromechanical switch

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12249468
SERIAL NO

17563021

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Abstract

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A radio frequency micro-electromechanical switch (RF MEMS switch) is described. Also described is a method of producing such an RF MEMS switch. The method can include depositing on a substrate a first sacrificial layer and producing a pattern. A first layer of metal is deposited on the first sacrificial layer and on the substrate. A pattern is produced to form a first RF line and a first MEMS membrane. A second sacrificial layer is deposited on the first RF line and a pattern is produced. A dielectric layer is deposited on the second sacrificial layer and then a pattern is produced to form a dome. The first and second sacrificial layers are removed through a dome opening. A second metal layer is deposited on the dome and on the substrate, and then a pattern is produced to plug the dome opening(s) and to form a second RF line.

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Patent Owner(s)

  • UNIVERSITE DE LIMOGES; CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS); AIRMEMS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blondy, Pierre Limoges, FR 8 18
Nadaud, Kevin Limoges, FR 3 17
Roubeau, Fabien Limoges, FR 2 0
Stefanini, Romain Limoges, FR 5 2
Zhang, Ling Yan Cognac-la-Foret, FR 5 4

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