Differential measurement system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12248255
APP PUB NO 20230152718A1
SERIAL NO

17916730

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Abstract

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A system for measuring the difference between a property of a first target and a property of a second target, the system comprising a first member and a second member, wherein the first member comprises a first pattern, and the speed of rotation of the first member is configured to be based on the property of the first target; and the second member comprises a second pattern wherein, the speed of rotation of the second member is configured to be based on the property of the second target, further wherein the first and second pattern are angularly-varying and are configured to generate an interference pattern by their interaction when the first and second members have a relative difference in their rotational speeds, the interference pattern being indicative of the magnitude of this difference.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aggarwal, Pulkit Veldhoven, NL 15 4
Steijns, Hubert Matthieu Richard Veldhoven, NL 4 40

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