Membrane probe card and its probe head
Number of patents in Portfolio can not be more than 2000
United States of America
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Mar 11, 2025
Grant Date -
Jun 1, 2023
app pub date -
Apr 22, 2022
filing date -
Apr 22, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A membrane probe card and its probe head, and the membrane probe card comprises a membrane probe head, and the membrane probe head consists of a support, membrane, a probe and an interconnecting wire; a concave supporting structure is arranged between the acting surface of the support and the membrane; the concave supporting structure comprises a concave structure and a supporting elastic layer, and the concave structure comprises one or more concaves, the concave corresponds to the position of the probe and the concaves are eccentric with the corresponding probes; the convex insert of the supporting elastic layer is embedded in the corresponding concave to generate a thickness difference between the two sides of each probe on the supporting elastic layer.
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