Apparatus for electroless metallization of a target surface of at least one workpiece, and method and diffuser plate for this purpose
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United States of America
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Mar 11, 2025
Grant Date -
Feb 16, 2023
app pub date -
Nov 18, 2020
filing date -
Nov 18, 2020
priority date (Note) -
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Abstract
The present invention relates to an apparatus (1) for the electroless metallization of a target surface of at least one workpiece (5), having a vessel (10) to accommodate a metallization solution having an inlet (15) and an outlet (16) for the metallization solution, and a holder (20) for accommodating the at least one workpiece (5) and can be arranged within the vessel (10), wherein at least one diffuser plate (30) is provided between the at least one inlet (15) and the holder (20) and has a multitude of diffuser openings (35) spaced apart in a plane of a plate (E), and wherein a movement device (40) is provided, which can move the diffuser plate (30) in at least one spatial direction in the vessel (10). The present invention further relates to a method for the electroless metallization of the target surface of the at least one workpiece (5).
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