Photocurable composition including a reactive polymer

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United States of America

PATENT NO 12247133
APP PUB NO 20230257617A1
SERIAL NO

17651544

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Abstract

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A photocurable composition can comprise a polymerizable material, and a photoinitiator, wherein the polymerizable material can comprise at least one polymerizable monomer and at least one reactive polymer. The reactive polymer can have a carbon content of at least 75% based on the total weight of the reactive polymer; a molecular weight of the at least one reactive polymer can be at least 400 g/mol and not greater than 50,000 g/mol; an amount of the reactive polymer may be at least 5 wt %; and a viscosity of the photocurable composition may be not greater than 100 mPa s. The photocurable composition may have a low linear shrinkage after curing, a high carbon content and high etch resistance and being suitable for AIP or NIL processing.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO JAPAN TOKYO METROPOLIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Weijun Cedar Park, US 78 565
Stachowiak, Timothy Brian Austin, US 26 229
Wan, Fen Austin, US 49 286

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