Device maintenance in semiconductor manufacturing environment

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12246404
APP PUB NO 20240082964A1
SERIAL NO

18517239

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chien, Vincent New Taipei, TW 7 53
Liao, Hill Hsinchu, TW 3 4
Yi-Cheng, Shih Zhubei, TW 3 4

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Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Sep 11, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 11, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 11, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00