Capacitive Micromachined ultrasonic transducers (CMUTs) having non-uniform pedestals

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United States of America

PATENT NO 12246348
APP PUB NO 20220283121A1
SERIAL NO

17686045

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Abstract

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An ultrasound device is described. The ultrasound device comprises a capacitive micromachined ultrasonic transducer (CMUT). The CMUT comprises a membrane, a substrate, a cavity disposed between the membrane and the substrate, wherein the cavity comprises a bottom surface adjacent to the substrate, and non-uniform pedestals protruding from the bottom surface of the cavity into the cavity and towards the membrane.

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Patent Owner(s)

  • BFLY OPERATIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miao, Lingyun Fremont, US 22 214
Satir, Sarp San Francisco, US 11 71

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