Silicon carbide nanoneedles and fabrication thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12246155
APP PUB NO 20220040463A1
SERIAL NO

16987121

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Abstract

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A product includes an elongated carbon-containing pillar having a bottom and a tip opposite the bottom. The width of the pillar measured 1 nm below the tip is less than 700 nm. A method includes masking a carbon-containing single crystal for defining masked regions and unmasked regions on the single crystal. The method also includes performing a plasma etch for removing portions of the unmasked regions of the single crystal, thereby defining a pillar in each unmasked region, and performing a chemical etch on the pillars at a temperature between 1200° C. and 1600° C. for selectively reducing a width of each pillar.

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Patent Owner(s)

  • LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bora, Mihail Livermore, US 17 101
Conway, Adam M Livermore, US 10 55
Frye, Clint D Livermore, US 2 0
Funaro, Devin Joseph Livermore, US 2 0
Grivickas, Paulius Vytautas Livermore, US 6 25
Hall, David L San Ramon, US 59 893
Voss, Lars F Livermore, US 27 60

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