Electromagnetic shield for a sealing mechanism of a laser chamber

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12245409
APP PUB NO 20230320047A1
SERIAL NO

18026874

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Abstract

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An apparatus for a light source includes: an electrical insulator that defines a channel; a gasket that surrounds at least a portion of the electrical insulator; and a shield between the channel and the gasket. The channel is configured to receive an electrical conductor. The gasket includes a non-metallic material.

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Patent Owner(s)

  • CYMER, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Khamehchi, Mohammad Amin San Diego, US 3 1

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