Optical isolation module

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12245350
APP PUB NO 20230139746A1
SERIAL NO

18075589

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Abstract

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An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Daniel John William San Diego, US 9 23
Das, Palash Parijat Oceanside, US 5 101
Schafgans, Alexander Anthony San Diego, US 6 12
Tao, Yezheng San Diego, US 26 174

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