Transversely-excited film bulk acoustic resonator with periodic etched holes
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Mar 4, 2025
Grant Date -
Jun 6, 2024
app pub date -
Jan 19, 2024
filing date -
Jan 19, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
There are disclosed acoustic resonators and method of fabricating acoustic resonators. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm. A periodic array of holes is provided in the diaphragm.
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International Classification(s)
- 2024 Application Filing Year
- H03H Class
- 599 Applications Filed
- 21 Patents Issued To-Date
- 3.51 % Issued To-Date
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- H03H Class
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