Bulk acoustic wave resonator with stacked piezoelectric layers

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United States of America

PATENT NO 12244292
APP PUB NO 20230124493A1
SERIAL NO

18045891

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Abstract

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A bulk acoustic resonator comprises a membrane including a piezoelectric film having multiple layers of piezoelectric material. At least one of the multiple layers of piezoelectric material has a different dopant concentration than another of the multiple layers of piezoelectric material.

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Patent Owner(s)

  • SKYWORKS GLOBAL PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abbott, Benjamin Paul Irvine, US 43 51
Gu, Myeong Gweon Seoul, KR 9 9
Han, Jong Duk Yongin, KR 13 35
Jin, Renfeng Irvine, US 11 65
Park, Myung Hyun Seongnam-si, KR 13 13
Shin, Kwang Jae Yongin, KR 77 256

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