High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12244117
APP PUB NO 20210367394A1
SERIAL NO

17397375

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Abstract

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A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

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Patent Owner(s)

  • NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY; GIGAPHOTON INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jiang, Weihua Nagaoka, JP 15 73
Umeda, Hiroshi Oyama, JP 72 369

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