Method for manufacturing semiconductor device structure with overlay marks

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12243832
APP PUB NO 20230326869A1
SERIAL NO

17716374

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Importance

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Abstract

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A method for manufacturing a semiconductor device structure with overlay marks is provided. The method includes providing a substrate; forming a first light-emitting feature on the substrate; forming a first pattern on the first light-emitting feature; and forming a second pattern on the first pattern. The first light-emitting feature is configured to emit a light of a first wavelength, and the first pattern has a first transmittance to the light of the first wavelength, the second pattern has a second transmittance to the light of the first wavelength, and the first transmittance is different from the second transmittance.

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Patent Owner(s)

  • NANYA TECHNOLOGY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wei, Chun-Yen Taipei, TW 7 0

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