Hard mask removal without damaging top epitaxial layer

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12243770
APP PUB NO 20230095956A1
SERIAL NO

17490465

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Abstract

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Embodiments disclosed herein describe methods of forming semiconductor devices. The methods may include etching vias and trenches in a middle-of-line (MOL) layer that has a low-k dielectric layer, a sacrificial nitride layer, and a hard mask layer. The methods may also include depositing a thin nitride layer within the via trench, depositing a carbon layer on the thin nitride layer within the vias and trenches, etching back the thin nitride layer to expose a portion of the hard mask layer, removing the hard mask layer and the carbon layer, and removing the thin nitride layer and the sacrificial nitride layer.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hsueh-Chung Cohoes, US 168 1154
Fan, Su Chen Cohoes, US 138 779
Mignot, Yann Slingerlands, US 128 357
Park, Chanro Clifton Park, US 420 2938
Vincent, Daniel J Madison, US 3 10
Waskiewicz, Christopher J Rexford, US 55 554

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