Substrate support assembly and substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
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Mar 4, 2025
Grant Date -
Oct 20, 2022
app pub date -
Jul 24, 2020
filing date -
Jul 24, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
In accordance with an exemplary embodiment of the present invention, an assembly for supporting substrate, the assembly comprising: a support frame having at least one insertion hole recessed from one surface of the support frame, the insertion hole having an inner movement hole and a screw hole positioned outside the inner movement hole; and a substrate support member including a shaft body inserted into the insertion hole with one end of the shaft body and a pin shaft connected to the shaft body to support the substrate in contact, wherein the shaft body having an inner screw body inserted into the insertion hole and positioned in the inner movement hole and a connection body disposed between the inner screw body and the pin shaft and positioned in the screw hole, wherein the inner diameter of the screw hole is smaller than the diameter of the inner movement hole and the outer diameter of the inner screw body, the inner screw body is capable of passing through the screw hole by rotation.
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