Gas supply block and substrate-processing apparatus including the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12243720
APP PUB NO 20220165548A1
SERIAL NO

17517068

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A gas supply block may include a first block, a second block and a third block. The first block may include a first gas inlet passage configured to supply a first process gas. The second block may include a second gas inlet passage configured to supply a second process gas. The third block may be combined with the first block and the second block. The third block may be configured to diffuse and supply the first process gas and the second process gas into gas supply lines connected to the processing spaces.

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Patent Owner(s)

  • WONIK IPS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Song, Byoung Ho Suwon-si, KR 4 18

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