Method and system for determining a charged particle beam exposure for a local pattern density

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United States of America

PATENT NO 12243712
APP PUB NO 20230386784A1
SERIAL NO

18365146

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Abstract

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Methods and systems for exposing a desired shape in an area on a surface using a charged particle beam system include determining a local pattern density for the area, based on an original set of exposure information. A pre-proximity effect correction (PEC) maximum dose for the local pattern density is determined, based on a pre-determined target post-PEC maximum dose. The pre-PEC maximum dose may be calculated near an edge of the desired shape. Methods also include modifying the original set of exposure information with the pre-PEC maximum dose to create a modified set of exposure information.

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Patent Owner(s)

  • D2S, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimura, Akira Saratoga, US 225 2554
Guthrie, William E Santa Clara, US 10 15
Pearman, Ryan San Jose, US 13 71
Shendre, Abhishek Fremont, US 6 7
Shirali, Nagesh San Jose, US 21 20
Zable, Harold Robert Palo Alto, US 35 376

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