Determining hot spot ranking based on wafer measurement

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12242201
APP PUB NO 20220035256A1
SERIAL NO

17276533

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Abstract

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A method of hot spot ranking for a patterning process. The method includes obtaining (i) a set of hot spots of a patterning process, (ii) measured values of one or more parameters of the patterning process corresponding to the set of hot spots, and (ii) simulated values of the one or more parameters of the patterning process corresponding to the set of hot spots; determining a measurement feedback based on the measured values and the simulated values of the one or more parameters of the patterning process; and determining, via simulation of a process model of the patterning process, a ranking of a hot spot within the set of hot spots based on the measurement feedback.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Weixuan Shenzhen, CN 7 12
Jain, Vivek Kumar Fremont, US 8 33
Peng, Wei Shenzhen, CN 118 1718
Yan, Fei Shenzhen, CN 36 117
Zhang, Youping Cupertino, US 67 2240

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