Apparatus, system and method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12242197
APP PUB NO 20210003922A1
SERIAL NO

16806468

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Abstract

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An apparatus and a method for effectively exhausting evaporated material are provided. In an embodiment the apparatus includes a hot plate and an exhaust hood assembly suspended over the hot plate. The exhaust hood assembly includes a trench plate, a cover plate over the trench plate and a single exhaust pipe header over and attached to a single exhaust opening of the cover plate. During operation, the exhaust hood assembly reduces the amount of condensation and also collects any remaining condensation in order to help prevent condensation from impacting further manufacturing steps.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Yu-Hsiang Hsinchu, TW 218 792
Kuo, Hung-Jui Hsinchu, TW 427 1983
Wang, Po-Han Hsinchu, TW 71 174
Yu, Chen-Hua Hsinchu, TW 2207 47923

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