Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration properties

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United States of America

PATENT NO 12242051
APP PUB NO 20220373785A1
SERIAL NO

17745186

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Abstract

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A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region elastically suspended above the cavity; at least a first pair of driving arms coupled to the tiltable structure and carrying respective piezoelectric material regions which may be biased to cause a rotation thereof around at least one rotation axis; elastic suspension elements coupling the tiltable structure elastically to the fixed structure and which are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion; and a piezoresistive sensor configured to provide a detection signal indicative of the rotation of the tiltable structure. At least one test structure is integrated in the die to provide a calibration signal indicative of a sensitivity variation of the piezoresistive sensor in order to calibrate the detection signal.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boni, Nicolo′ Mountain View, US 7 1
Carminati, Roberto Piancogno, IT 67 148
Duqi, Enri Milan, IT 56 120
Mendicino, Gianluca Legnano, IT 2 0
Merli, Massimiliano Pavia, IT 28 41

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