Metrology system utilizing annular optical configuration

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12242047
APP PUB NO 20250004263A1
SERIAL NO

18344705

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An annular optical configuration is provided for utilization in a metrology system to redirect source light. The metrology system includes a camera that provides images of a workpiece at different focus positions through operation of a variable focal length lens and an objective lens configuration (OLC). The OLC includes one of a plurality of objective lenses having respective working distances and working distance focus positions. An annular lighting configuration directs source light toward a first central volume which includes a first working distance focus position of a first objective lens when the first objective lens is included in the OLC. When a second objective lens with a second working distance focus position is included in the OLC, the annular optical configuration is configured to be located in front of the lighting configuration to redirect the source light toward a second central volume which includes the second working distance focus position.

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Patent Owner(s)

  • MITUTOYO CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gladnick, Paul Gerard Seattle, US 25 284

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