Synthetic quartz glass substrate with antireflection film, window material, lid for optical element package, optical element package, and light irradiation device
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United States of America
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Mar 4, 2025
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Mar 10, 2021
filing date -
Mar 10, 2021
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Abstract
A synthetic quartz glass substrate with an antireflection film, including: a synthetic quartz glass substrate; and an antireflection film formed on a main surface of the synthetic quartz glass substrate, wherein a contact angle measured by a sessile drop method of JIS R 3257:1999 of the main surface of the synthetic quartz glass substrate is within 5 degrees, and the antireflection film includes a first layer containing Al2O3, a second layer containing HfO2, and a third layer containing MgF2 or SiO2 sequentially laminated on the main surface of the synthetic quartz glass substrate.
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