Test apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12241926
APP PUB NO 20220050136A1
SERIAL NO

17512021

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A test apparatus tests a wafer under test on which devices under test each including magnetoresistive memory or a magnetic sensor are formed. In a test process, the wafer under test is mounted on a stage. In the test process, a magnetic field application apparatus applies a magnetic field BEX to the wafer under test. A test probe card is used in the test process. Multiple magnetization detection units are formed on a diagnostic wafer. In a diagnostic process of the test apparatus, the diagnostic wafer is mounted on the stage instead of the wafer under test. Each magnetization detection unit is capable of measuring a magnetic field BEX generated by the magnetic field application apparatus. In the diagnostic process, the diagnostic probe card is used instead of the test probe card.

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Patent Owner(s)

  • ADVANTEST CORPORATION; TOEI SCIENTIFIC INDUSTRIAL CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sato, Shigeyuki Sendai, JP 21 236
Utsumi, Ryoichi Sendai, JP 3 1
Watanabe, Naoyoshi Tokyo, JP 16 411

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