Bidirectional Littrow two-degree-of-freedom grating interference measurement device based on double gratings

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United States of America

PATENT NO 12241739
SERIAL NO

18896369

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A bidirectional Littrow two-degree-of-freedom grating interference measurement device based on double gratings includes a transmission two-dimensional grating and a reflection two-dimensional grating. A dual-frequency laser emitted by a light source passes through the transmission two-dimensional grating with a specific grating pitch to form four beams in X direction and Y direction, the four beams are incident on the reflection two-dimensional grating at a Littrow angle, and the four beams diffracted by the reflection two-dimensional grating return to the transmission two-dimensional grating in an incidence direction along the same path; different orders of transmission light of the four beams of light in different directions may form stable interference signals carrying displacement information, and the stable interference signals are received by a detector.

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Patent Owner(s)

  • CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCES

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Wenhao Changchun, CN 85 699
Liu, Lin Changchun, CN 241 2041
Liu, Zhaowu Changchun, CN 6 1
Sun, Yujia Changchun, CN 7 2
Zhou, Wenyuan Changchun, CN 6 0

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