Aligned carbon nanotubes

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United States of America

PATENT NO 12240760
APP PUB NO 20190375638A1
SERIAL NO

16424828

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Abstract

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Methods of forming carbon nanotubes and structures and devices including carbon nanotubes are disclosed. Methods of forming the carbon nanotubes include patterning a surface of a substrate with polymeric material, removing portions of the polymeric material to form exposed substrate surface sections, and forming the carbon nanotubes on the exposed substrate sections.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haukka, Suvi Helsinki, FI 94 21518

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