MEMS device, assembly comprising the MEMS device, and methods for operating the MEMS device

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United States of America

PATENT NO 12240749
APP PUB NO 20220380200A1
SERIAL NO

17755934

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Abstract

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Proposed is a MEMS device comprising a layer stack having at least one second layer formed between a first layer and a third layer. At least one first cavity is formed in the second layer. The MEMS device further comprises a laterally deflectable member having an end connected to a sidewall of the first cavity and a free end. Further, the MEMS device includes a passive element rigidly tethered to the free end of the laterally deflectable element to follow movement of the laterally deflectable element. The laterally deflectable element and the passive element divide the first cavity into a first sub-cavity and a second sub-cavity. The first sub-cavity is in contact with an ambient fluid of the MEMS device via at least a first opening. Further, the second subcavity is in contact with the ambient fluid of the MEMS device via at least a second opening. The at least one first opening is formed in a different layer of the first layer and the third layer than the at least one second opening.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaiser, Bert Dresden, DE 15 32

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