MEMS die and MEMS-based sensor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12240748
APP PUB NO 20220298005A1
SERIAL NO

17207722

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Abstract

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A micro-electro-mechanical systems (MEMS) die includes a piston; an electrode facing the piston, wherein a capacitance between the piston and the electrode changes as the distance between the piston and the electrode changes; and a resilient structure (e.g., a gasket or a pleated wall) disposed between the piston and the electrode, wherein the resilient structure supports the piston and resists the movement of the piston with respect to the electrode. A back volume is bounded by the piston and the resilient structure and the resilient structure blocks air from leaving the back volume. The piston may be a rigid body made of a conductive material, such as metal or a doped semiconductor. The MEMS die may also include a second resilient structure, which provides further support to the piston and is disposed within the back volume.

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Patent Owner(s)

  • KNOWLES ELECTRONICS, LLC

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Loeppert, Peter V Durand, US 58 1769
Naderyan, Vahid Chicago, US 22 45
Pedersen, Michael Long Grove, US 85 1006

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