Assembly of piezoelectric material substrate and supporting substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12239022
APP PUB NO 20240074316A1
SERIAL NO

18502682

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Abstract

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A bonded body includes a supporting substrate, a silicon oxide layer provided on the supporting substrate, and a piezoelectric material substrate provided on the silicon oxide layer and composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate. The surface resistivity of the piezoelectric material substrate on the side of the silicon oxide layer is 1.7×1015Ω/□ or higher.

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Patent Owner(s)

  • NGK INSULATORS LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Yuji Owariasahi, JP 128 1548
Takagaki, Tatsuro Nagoya, JP 22 29
Yamadera, Takahiro Nagoya, JP 21 56

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