Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses

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United States of America

PATENT NO 12237827
APP PUB NO 20220123730A1
SERIAL NO

17563936

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Abstract

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Filters and methods of making filters are disclosed. A filter device includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between a surface of the substrate and a back surface of the piezoelectric plate. A first portion of the piezoelectric plate has a first thickness, and a second portion of the piezoelectric plate has a second thickness less than the first thickness. A conductor pattern on front surfaces of the first and second portions of the piezoelectric plate includes a first interdigital transducer (IDT) with interleaved fingers on the first portion, and a second IDT with interleaved fingers on the second portion.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hammond, Robert B Santa Barbara, US 72 1997
Turner, Patrick San Bruno, US 141 3419
Yantchev, Ventsislav Sofia, BG 138 3509

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