Composite substrate, elastic wave element, and production method for composite substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237824
APP PUB NO 20220103155A1
SERIAL NO

17545507

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Abstract

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A composite substrate includes a supporting substrate composed of quartz, a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and an interface layer along a bonding interface between the supporting substrate and the piezoelectric material substrate. The interface layer has amorphous structure and contains constituent components including silicon, oxygen and at least one of tantalum and niobium. The interface layer has concentrations of hydrogen atoms, nitrogen atoms and fluorine atoms of 1×1018 atoms/cm3 or higher and 5×1021 atoms/cm3 or lower, respectively.

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Patent Owner(s)

  • NGK INSULATORS LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Yuji Owariasahi, JP 128 1548
Yamadera, Takahiro Nagoya, JP 21 56

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