MEMS assembly and process flow

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237780
APP PUB NO 20230097412A1
SERIAL NO

17936699

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Importance

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Abstract

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A temporary MEMS-based locking assembly is configured to temporarily compress electrically conductive flexures and includes: a first locking structure coupled to a first portion of a MEMS conductive assembly; a second locking structure coupled to a second portion of the MEMS conductive assembly, wherein: the electrically conductive flexures are positioned between the first portion of the MEMS conductive assembly and the second portion of the MEMS conductive assembly, and the first and second locking structures are configured to engage each other upon the compression of the electrically conductive flexures to effectuate the locking of the first portion of the MEMS conductive assembly with respect to the second portion of the MEMS conductive assembly.

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Patent Owner(s)

  • MEMS DRIVE (NANJING) CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Xiaolei South Pasadena, US 115 570
Ng, Matthew Rosemead, US 42 158
Wang, Guiqin Arcadia, US 72 539

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