Line narrowing device and electronic device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America
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Feb 25, 2025
Grant Date -
Dec 1, 2022
app pub date -
Aug 11, 2022
filing date -
Aug 11, 2022
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Abstract
A line narrowing device includes a first prism; first and second gratings arranged on the optical path of the light beam having passed through the first prism at positions different in a direction of grooves of either the first grating or the second grating; a beam adjustment optical system arranged on the optical path of the light beam between the first prism and at least one grating of the first and second gratings, and causing a first portion of the light beam to be incident on the first grating and causing a second portion of the light beam to be incident on the second grating; a first actuator adjusting an incident angle of the first portion on the first grating; a second actuator adjusting an incident angle of the second portion on the second grating; and a third actuator adjusting an energy ratio of the first and second portions.
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