Hollow-core photonic crystal fiber based broadband radiation generator

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United States of America

PATENT NO 12237639
APP PUB NO 20230144419A1
SERIAL NO

18085338

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Abstract

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A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Belli, Federico Edinburgh, GB 4 39
Brahms, Malte Christian Edinburgh, GB 2 5
Brouns, Andreas Johannes Antonius Eindhoven, NL 8 29
Hugers, Ronald Franciscus Herman Best, NL 20 264
Travers, John Colin Edinburgh, GB 2 5

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