On-board cleaning of tooling parts in hybrid bonding tool

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237186
APP PUB NO 20240096664A1
SERIAL NO

17945910

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Abstract

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Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choragudi, Praveen Kumar Singapore, SG 3 0
Jupudi, Ananthkrishna Singapore, SG 56 228
See, Guan Huei Singapore, SG 67 203
Wang, Ruiping San Jose, US 65 1466
Wang, Ying Singapore, SG 968 7243

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