Laser machining apparatus and laser machining method
Number of patents in Portfolio can not be more than 2000
United States of America
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Feb 25, 2025
Grant Date -
Dec 1, 2022
app pub date -
Jan 31, 2022
filing date -
Jan 31, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A laser machining apparatus includes, a processing chamber, a window disposed in a surface of the processing chamber, a substrate carrier disposed inside the processing chamber and facing the window, a laser irradiator which irradiates a laser onto the substrate carrier through the window, a protector supplier disposed on a side of the processing chamber, a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber, and a protector which connects the protector supplier with the protector retriever, where at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.
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