Fittings for wafer cleaning systems

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237179
APP PUB NO 20230051164A1
SERIAL NO

17671664

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A fitting for an upper brush in a double brush scrubbing chamber of a wafer cleaning system is disclosed. The fitting includes a base plate, a flanged pipe, and a threaded connector. The base plate includes a threaded hole with a stop surface therein and a channel extending from the stop surface through a lower surface of the base plate. The flanged pipe is inserted into the base plate such that the flange at the top end of a hollow tube rests on the stop surface and the hollow tube passes through the channel of the base plate. The threaded connector has a passage therethrough, and engages the threaded hole of the base plate to fix the flanged pipe in place. This structure is able to provide fluid while minimizing particle generation.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANYNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Cheng-Ping Taichung, TW 14 14
Chen, Chun Yan Zhubei, TW 13 7
Cheng, Ching-Wen Zhubei, TW 51 496
Chou, Ping-Shen Hsinchu, TW 3 1
Lai, Tsung-Lung Hsinchu, TW 9 1

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